Celerity :: About

Celerity is a leader in the design, engineering, and manufacturing of precision instruments and advanced gas and liquid delivery solutions for the global semiconductor and related electronics markets. Our long history of close customer relationships with both original equipment manufacturers (OEMs) and integrated circuit (IC) manufacturers is distinguished by a legacy of achieving "firsts" that meet the industry’s most advanced needs.

We are experts at pioneering technologies that require high-precision mechanical engineering and thermal and magnetic modeling, such as our patented MultiFlo™, PTI, and Step™ technologies. We are known for the superiority of our gas delivery and liquid flow control modules and systems, which enable increased customer efficiencies and lower cost of ownership because of their accuracy, repeatability, and faster response times. And we remain differentiated in the way we partner with customers, bringing to bear our design engineering and experience in integrating Celerity’s innovative instruments into high-performance custom gas and liquid delivery systems.

Today, as the semiconductor and electronics industries reach for 45nm geometries and below, Celerity’s technological advances in accuracy, response times, and repeatability serve to enable the next generation of advanced gas and liquid delivery solutions.

To download our corporate fact sheet, click here.

Celerity At Glance

Founded: 1999
Employees: 1000
Corporate Headquarters: San Jose, CA

Global Resources:

Customer support: 14 offices worldwide providing direct sales, service and applications support.

Global technical support
Gas, liquid, vapor delivery module manufacturing
Flow measurement and control and manufacturing
Chemical and slurry blending and distribution equipment manufacturing
Gas pressure measurement and display instrument manufacturing
Vacuum measurement and control instrument manufacturing

Manufacturing and Service Locations:

United States	International
Allen, TX Austin, TX Irvine, CA Portland, OR	Bangalore, India Dresden, Germany Dublin, Ireland Hsinchu, Taiwan Selangor, Malaysia	Seoul, South Korea Shanghai, China Singapore Tianjin, China Tokyo, Japan

Markets:

Semiconductors
Flat Panel Displays
Solar/Photovoltaics (PV)

Magnetic and Optical Storage Devices
Micro-Electro Mechanical Systems (MEMS)

Complementary Metal – Oxide – Semiconductor (CMOS)

Principal Products:

Blend + Dispense

Chemical Blending + Distribution Systems

Chemical Bulk Distribution Systems
Chemical Bulk Blending + Distribution Systems
Chemical Point-of-use Systems
Metrology Systems

Slurry Blending + Distribution Systems

Slurry Bulk Distribution Systems
Slurry Bulk Blending + Distribution Systems
Slurry Point-of-use Systems
Metrology Systems

Integrated System Solutions

Gas Delivery Solutions
Liquid Delivery Solutions

Plastic Expertise in Machining, Welding, and Assembly

Flow Measurement + Control

Gas Flow Controllers
Gas Flow Meters
Gas Power Supplies
Liquid Flow Controllers

Liquid Flow Meters
Gas Flow Verifier Module
Ratio Flow Controller Module
Vapor Delivery Module

Pressure Measurement + Display

Pressure Transducers
Pressure Gauges

Pressure Display and Controllers
Cylinder Scales

Vacuum Measurement + Control

Capacitance Manometers
Chamber Pressure Control Systems
Pressure Controllers

Throttle Valves
Integrated Pressure Controllers

Accessories

Filtration Boxes
Valve Boxes

Electrical Support Panels
Storage Cabinets

The Celerity GFV100 gas flow verifier is a compact Rate of Rise flow measurement standard designed to validate MFC accuracy on-tool with actual process gases. The GFV100 enables accurate, faster flow checks compared to traditional process chamber based leak-up tests.

Benefits: