Contacts

We value close relationships with our customers and other industry constituents, which includes keeping our communication channels open and available. Please select from the following contact list, according to your needs.

Celerity, Inc.
2645 Zanker Road, Suite 101
San Jose, CA 95134
T +1 408 935 4500
F +1 408 935 4506
Celerity Locations

Customers

For contact information for customer care, technical support, field service support, please select Sales + Support.

Financial Community

For financial or investor information, please contact:

Ron Lacey
Vice President of Finance
+1 408 935 4546

Public Relations

If you are a member of the national, global, local, business, or trade press and are interested in corporate business, products, technology, or speaking with Celerity executives, please contact:

Carol Kimura
Director of Corporate Marketing
+1 408 935 4533

Website

Give us your feedback or report any problems you experienced finding information on our website.

Corporate Marketing
  • About
  • Contacts
  • Employment
  • Executives
  • Milestones
The Celerity GFV100 gas flow verifier is a compact Rate of Rise flow measurement standard designed to validate MFC accuracy on-tool with actual process gases. The GFV100 enables accurate, faster flow checks compared to traditional process chamber based leak-up tests.
Benefits:
  • Greater accuracy at lower gas flows
  • Technology path to in-situ re-calibration of MFC’s
  • Flow Range: 1 sccm to 2000 sccm
  • Simple tool integration