By design and through selected acquisitions, our vision was to engineer Celerity into the premier supplier of precisions instruments and high-performance gas and liquid delivery modules.

From our early mastery of key components, to developing integrated systems-level solutions that address strategic customer needs, we have extended Celerity’s capabilities as an outsource provider of turnkey innovations. This timeline represents the major hallmarks in our focused technology investments that have helped Celerity achieve its critical mass in providing the industry’s next generation solutions.

2006 February

Acquired Entegris’ Gas Delivery Business, consisting of gas mass flow controllers, vacuum gauges, pressure transducers, and other components used in the manufacturing of semiconductors and related high tech products.

2005 October

Established sales and service operations in Taiwan.

2004 July

Developed breakthrough technologies in liquid flow control, concentration management, and particle characterization technologies, which enable the next-generation of integrated, in-line, and analytical instrumentation.

2003 December

Integrated Kinetics Chempure Systems, a leading designer and manufacturer of chemical and slurry blending and distribution systems.

2003 July

Developed PTI Module, a gas delivery system that integrates MultiFlo, PTI, and Step technologies in an industry-leading footprint.

2002 July

Introduced Celerity as the new name for Kinetics Fluid Systems.

2002 July

Introduced Step technology, which enables fast setpoint control response through an optimized sensor drive system.

2002 July

Developed PTI technology, which utilizes a dual sensor controller to compensate for yield-impacting pressure transients.

2002 May

Acquired Poly Concepts, a leading designer and manufacturer of chemical delivery process modules.

2002 January

Acquired Marchi Systems, a leading designer and manufacturer of thermal control systems, which incorporate temperature sensors, heaters, and controllers.

2000 October

Launched MultiFlo technology, an N2-calibrated, gas and range configurable flow control solution.

2000 May

Formed a global service and support organization to serve customers worldwide.

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The Celerity GFV100 gas flow verifier is a compact Rate of Rise flow measurement standard designed to validate MFC accuracy on-tool with actual process gases. The GFV100 enables accurate, faster flow checks compared to traditional process chamber based leak-up tests.
Benefits:
  • Greater accuracy at lower gas flows
  • Technology path to in-situ re-calibration of MFC’s
  • Flow Range: 1 sccm to 2000 sccm
  • Simple tool integration