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IN3XP
The Celerity IN3XP mass flow controller represents the third generation of digital mass flow controllers and delivers an innovative, leading-edge technology that enables the most advanced processes. The IN3XP seamlessly integrates critical gas delivery technologies such as flow control, pressure measurement and display into a single platform to provide industry leading performance.
Benefits:
  • Greater than 1% of setpoint accuracy enables tighter process control and higher yields
  • High turndown ratio allows for a wide control range down to 2% of full scale
  • Pressure insensitivity solves pressure regulator issues and improves MFC stability
  • Wide variety of product options, including an embedded transducer, allows for customization to applications
  • Multi-gas / multi-range systems developed with actual gas to ensure world class performance
PDF  View Product DatasheetMore
  IN3XP Demo