For articles written about Celerity in industry publications, click on a link below.

2005 July
Publication: Manufacturing Today

2001 June
Publication: European Semiconductor Magazine

2001 February
Publication: Solid State Technology Magazine

2000 December
Publication: Semiconductor Magazine

2000 June
Publication: European Semiconductor Magazine

2000 March
Publication: European Semiconductor Magazine

1999 April
Publication: Solid State Technology Magazine

1997 October
Publication: Solid State Technology Magazine

1997 March
Publication: Semiconductor International Magazine

  • Articles
  • Events
  • Media Contacts
  • Press Releases
IN3XP
The Celerity IN3XP mass flow controller represents the third generation of digital mass flow controllers and delivers an innovative, leading-edge technology that enables the most advanced processes. The IN3XP seamlessly integrates critical gas delivery technologies such as flow control, pressure measurement and display into a single platform to provide industry leading performance.
Benefits:
  • Greater than 1% of setpoint accuracy enables tighter process control and higher yields
  • High turndown ratio allows for a wide control range down to 2% of full scale
  • Pressure insensitivity solves pressure regulator issues and improves MFC stability
  • Wide variety of product options, including an embedded transducer, allows for customization to applications
  • Multi-gas / multi-range systems developed with actual gas to ensure world class performance