For articles written about Celerity in industry publications, click on a link below.

2005 July
Publication: Manufacturing Today
Title: PDFCelerity Innovation Helps OEMs Reach Their Goals

2001 June
Publication: European Semiconductor Magazine
Title: PDFSmall pack of gas

2001 February
Publication: Solid State Technology Magazine
Title: PDFEliminating the effects of gas system pressure transients

2000 December
Publication: Semiconductor Magazine
Title: PDFModular Gas Systems: The Need for a Standard

2000 June
Publication: European Semiconductor Magazine
Title: PDFThe Patter of Tiny Footprints

2000 March
Publication: European Semiconductor Magazine
Title: PDFOptimised MFCs make SDS Economic

1999 April
Publication: Solid State Technology Magazine
Title: PDFThermal-based mass flow control for SDS gas delivery systems

1997 October
Publication: Solid State Technology Magazine
Title: PDFManifold Destiny: Gas Systems Go Modular

1997 March
Publication: Semiconductor International Magazine
Title: PDFConsistent ±3 Sigma Calibration for Mass Flow Controllers

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IN3XP
The Celerity IN3XP mass flow controller represents the third generation of digital mass flow controllers and delivers an innovative, leading-edge technology that enables the most advanced processes. The IN3XP seamlessly integrates critical gas delivery technologies such as flow control, pressure measurement and display into a single platform to provide industry leading performance.
Benefits:
  • Greater than 1% of setpoint accuracy enables tighter process control and higher yields
  • High turndown ratio allows for a wide control range down to 2% of full scale
  • Pressure insensitivity solves pressure regulator issues and improves MFC stability
  • Wide variety of product options, including an embedded transducer, allows for customization to applications
  • Multi-gas / multi-range systems developed with actual gas to ensure world class performance
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