Celerity ®

February 8, 2000 – Kinetics Fluid Systems will launch two advanced options for reducing the size of gas delivery systems at Semicon Europa. These are a revolutionary digital mass flow controller which eliminates the need for pressure regulation; and a new-generation modular gas system which allows tool developers and semiconductor manufacturers to significantly simplify the assembly of gas delivery systems.

The new mass flow controller (MFC) combines a new approach to applying the well proven thermal sensing technology with the speed of control made possible by digital communications. The technique eliminates the need for a pressure regulator to buffer typical gas systems pressure fluctuations upstream of traditional MFCs. This breakthrough has the potential to dramatically reduce the size of gas systems, as installing a regulator to handle pressure surges typically necessitates an additional pressure transducer/gauge and a filter to clean up particle shedding.

Kinetics’ second major introduction will be a new generation of modular surface-mount technology for building gas systems. This new product builds on the success of the company’s established IGS (integrated gas system) which allows users to surface-mount gas delivery components on modular substrate blocks compatible with industry-standard C-seals. The new modular surface-mount technology will save a major amount of real estate within and around the semiconductor tool, and is viewed as the ideal technology for implementing 300mm process lines.

These new products are now supported locally via Kinetics’ newly integrated European structure, which now combines both instrument and flow control system development and manufacturing, allowing the group to respond rapidly and efficiently to the needs of the region’s semiconductor and high-purity industries.