MILPITAS, Calif., July 14, 2003 – Celerity Group, Inc. today announced the introduction of its next generation gas delivery modules used in semiconductor tools for monitoring and controlling process gases. These new modules feature a host of performance-enhancing and cost-reducing benefits, and are the first in the market to be manufactured and offered as one integrated module.
The modules employ Celerity’s proprietary technologies PTI, MultiFlo™ and STEP™. The PTI (pressure transient insensitive) technology eliminates the effects of upstream pressure instability commonly found in gas delivery systems and ensures even and flawless output of gases. MultiFlo enables users to reconfigure the required gases and ranges anywhere, at any time, using a bundled software program. Further, MultiFlo technology covers 85% of all gases and ranges used in a typical production fab. STEP technology enables fast response in critical processing applications. It utilizes a high speed DSP (digital signal processor) and employs an optimized sensor drive circuit to deliver industry leading flow stabilization times.
The flexibilities that these embedded technologies provide, combined with Celerity’s preferred modular architecture, optimize the systems’ performance output, reduce footprint, increase tool uptime, and reduce costs of ownership.
“These modules address the needs of our maturing industry,” said Daniel Rubin, President of Celerity. “ New products must provide performance benefits, lower the total cost of ownership, and reduce manufacturing cycle times. Our products will reduce inventories, minimize cost of change, and provide process improvements,” concluded Rubin.
Celerity is a leading provider of gas and chemical delivery process modules and critical instruments to the semiconductor, biotechnology, and related industries requiring high precision and flow control. Celerity, formerly known as Kinetics Fluid Systems, is a division of Kinetics Group, Inc. For more information, please visit www.celerity.net.