MILPITAS, Calif., July 7, 2004 – Celerity Group, Inc. today announced the introduction of its Unit™ L Series liquid flow controller product line used in semiconductor tools for monitoring and controlling liquid process chemicals. This new product line features a number of benefits that are designed to enhance performance and reduce costs, and is the first in the market to be manufactured and offered using Celerity’s InFlo™ technology.
The liquid flow controllers employing Celerity’s proprietary InFlo™ technology are based on ultrasonic sensors and signal processing algorithms. InFlo™ enables users to control liquids from 50mL/min to 2000mL/min with an accuracy of 1% of flow. The ultrasonic sensor is non-intrusive and is immune to changes in pressure.
The Unit™ L Series has been specifically designed to control and monitor slurry and liquid chemical recipes at point-of-use. Through efficient chemical usage, process owners can increase process repeatability, gain flexibility, and realize savings. The flexibility provided by InFlo™ can enhance the system’s performance output, increase tool uptime and reduce cost of ownership.
“By leveraging our experience and capabilities in gas flow control, we have been able to produce innovative technology for liquid flow control in support of current and next generation liquid based processes,” said Joe Foster, Senior Vice President of Technology & Marketing at Celerity. “This new product technology together with our global service and support infrastructure, and strategically located manufacturing platforms, provide what we believe to be a compelling solution in this market,” concluded Foster.
About Celerity
Celerity is a leader in the design and production of high-performance gas and chemical delivery process modules that are integral to the equipment used in manufacturing semiconductors, flat panel displays, and related products. For additional information, please visit www.celerity.net.