Celerity Acquires Entegris’ Gas Delivery Business

Acquisition enhances Celerity’s position as a leading supplier of critical instruments to the semiconductor and other high tech industries.

MILPITAS, CA, February 6, 2006 – Celerity, Inc., a leading global provider of gas and chemical delivery solutions to the semiconductor and other high tech industries, announced today that it has acquired the assets of a line of gas delivery products from Minnesota-based Entegris, Inc. The acquisition expands Celerity’s portfolio of solutions for its customers and is a key part of the company’s growth strategy.

The Entegris gas delivery product line consists of gas mass flow controllers, vacuum gauges, pressure transducers, and other components used in the manufacturing of semiconductors and related high tech products. As part of the transaction, Celerity also acquired the Entegris manufacturing facility in Allen, Texas and gas delivery field service centers in Shanghai and Taiwan.

“This transaction is an outstanding opportunity for Celerity and a positive step for our customers, partners and suppliers,” stated David Shimmon, Chairman and CEO of Celerity. “The acquisition will allow us to increase our operational leverage, strengthen our technology development activities, and significantly enhance our intellectual product portfolio.”

About Entegris

Entegris is the global leader in materials integrity management - purifying, protecting and transporting critical materials used in high technology products, processes and services. Entegris and Mykrolis completed their merger to create the new Entegris in August 2005. The merged Company delivers technology, product and service solutions to the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.

About Celerity

Celerity, headquarter in Milpitas, California, is a global leader in the design and production of high-performance gas and chemical delivery process modules and critical instruments that are integral to the equipment used in manufacturing semiconductors, flat panel displays, and related products. For additional information, please visit www.celerity.net.

CONTACTS

Industry Media Inquiries

Carol Kimura
Director of Corporate Marketing
Phone: +1 408 935 4500
Email: ckimura@celerity.net

Financial Media and Investor Inquiries

Ron Lacey
Vice President of Finance
Phone: +1 408 935 4500
E-mail: rlacey@celerity.net

Press Releases
The Celerity VDM100 Vapor Delivery Module is a compact vapor delivery solution, designed for simple OEM tool integration. The VDM100 employs proven thermal mass flow delivery and advanced digital electronics for improved accuracy and reliability.
Benefits:
  • Improved accuracy
  • High purity design
  • Compact design
  • Improved reliability through design