Celerity’s long history of experience in fluid handling and delivery has earned us a reputation for product excellence and innovation in high-purity applications. We combine seasoned knowledge of instrumentation and systems that address gas and liquid delivery needs to create value-added solutions for OEMs and end-users.

Moreover, we offer adjacent technologies such as thermal, pressure and vacuum sensing instruments, which support critical productivity performance levels. Equally important is our products’ ability to create chemistries in situ, mixing and blending in exact quantities and precision timing.

As the semiconductor and electronics industries’ needs continue to evolve, Celerity’s products remain a reliable resource, setting the standard for response times, accuracy, process metrology, and process robustness. Our products and services include: gas, liquid, and vapor delivery modules, chemical and slurry blending and distributions systems, gas and liquid flow controllers and meters, temperature sensors and heaters, chamber pressure control systems, capacitance manometers, pressure transducers, pressure gauges, pressure displays and controllers, and cylinder scales. Moreover, we support all our products in a global customer care program that is available around the clock, seven days a week.

Pressure Measurement + Display
Thermal Measurement + Display
Vacuum Measurement + Control
  • Blend + Dispense Systems
  • Flow Measurement + Control
  • Pressure Measurement + Display
  • Thermal Measurement + Control
  • Vacuum Measurement + Control
Celerity custom designs and manufactures an array of highly accurate temperature sensors, including thermocouples and RTDs, in any custom configuration, size, or shape that our client may require. Additionally, we manufacture silcone rubber-backed heaters for heating gas line weldments, valves, filters, ampoules, and other piping components.
Benefits:

Thermocouples

  • Custom designed for unique customer needs
  • Built for success in adverse plasma and vacuum environments
  • Individual calibration reports available
  • Manufactured in all ANSI types
  • Recognized market leader with 30+ years designing and manufacturing custom sensors

Gas-Line Heaters

  • High uniformity
  • Predictable thermal performance
  • Custom-built configurations
  • Precise engineering
  • Lowered lifetime cost of ownership and reduced maintenance costs


North America Support

+1 888 275 8946

International Support

+(INTL access code) 800 3333 3100

Download INTL access code list here.

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SEMICON West 2008
Date: July 15 - 17, 2008
Venue: W Hotel
Location: San Francisco, CA
Booth: Work Room 3
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