Celerity :: Blend + Dispense Systems

Because the semiconductor industry is moving toward tighter geometries and process tolerances, it requires more precise control of process slurry and chemical assays for manufacturers’ applications. At the same time, semiconductor companies seek to minimize costs in bulk delivery and point-of-use blending.

The challenge for bulk delivery is to operate it with fewer systems under tighter constraints in flow rate, pressure, and chemical and slurry assays. Improved point-of-use blending requires new methods for performing chemical blending and distribution for finite measure and low quantity.

To meet these challenges, Celerity offers the long-established expertise of our Mega brand to custom-design solutions that accommodate customer constraints. Mega provides a broad spectrum of specialized blend and dispense equipment and accompanying metrology for diverse applications, including CMP, ECD, and post-CMP cleaning applications. In addition, Mega applies a flexible modular architecture in its product design, which benefits our customers by maximizing functionality, accessibility, and serviceability, while lowering overall cost of ownership. Celerity also distinguishes itself through our active research-and-development group, which tests and verifies specific customer blend and dispense applications and assays before equipment purchase. This approach characterizes our tradition of working closely with customers, collaborating and walking them through the solution in close cooperation so that the results always match the end-user’s needs and expectations.

Chemical Blending + Distribution

Within the semiconductor industry, the need for precise chemical blending and distribution controls of chemical assay, flow, and pressure is critical for applications such as post-CMP and electrochemical deposition.

Chemical Bulk Distribution Systems
Chemical Bulk Blending + Distribution Systems
Point-of-Use
Metrology
Liquid R&D Laboratory

Slurry Blending + Distribution

Celerity is a leader in supplying slurry blending and distribution equipment to the semiconductor industry’s CMP market. Our systems reflect a deep understanding of the primary slurry groups, such as silica oxide slurries, alumina, and Ceria-based slurries.