Celerity ®

Celerity’s bulk distribution systems allow customers to load or supply chemicals from an easily accessible point across distances and elevations to a point of usage within the fab’s more expensive areas. These systems support the full spectrum of applications – from low-flow, low-pressure, to high-flow, high-pressure – we market a variety of systems:

• MP25 is a low-flow, low-pressure distribution device often used within the semiconductor industry’s research and development sector to supply chemical between locations.
• MP50 offers higher throughput.
• MP100 supports high throughput plus various user configurable options.
• For the greatest flexibility in chemical distribution solutions, the MP500 integrates distribution redundancy with the ability to store chemical in day tanks. It can also distribute chemical to the fab and filter both blended and distributed chemistries.

Many customer post-CMP cleaning applications (including SC1, SC2, etc.) require dilution and/or highly specific chemical blends to be distributed from one location to another within the fab. Celerity offers two product lines as solutions to these needs:

• MB1000 series and MB2000 series, with the latter offering a higher throughput. Both systems can add up to three constituents to their blends, and both employ day tanks and pumps to distribute chemical to the fab. Within different series, different process functions and metrologies are used to meet customer requirements and specifications.

Celerity’s point-of-use systems integrate flow controllers that employ a variety of flow measuring and metering techniques. We offer direct flow control point-of-use systems with chemistries based on customer recipes. We also design systems with closed-loop, feed-forward or feed-back techniques to automatically maintain chemical quality during the point-of-use distribution. Both types of systems provide excellent control for low flow chemical throughput applications.

Choosing the right metrology is critical to semiconductor customers for ensuring that their processes adhere to the tight accuracies in precision blending required for high yields. Celerity addresses this need with its expertise in a variety of inferential and direct measurement techniques. Our inferential techniques, which include refractometry, conductivity, pH, and ultrasonic, provide a low cost of ownership approach to analyze and quantify the concentration of chemistries in a solution. We also specialize in developing direct measurement techniques such as near infrared and titration, which are capable of detecting the presence or absence of specific chemistries via direct measurement of bonds or specific reaction products. Moreover, Celerity is continuously researching new measuring techniques as we custom design robust metrology tools for the latest customer needs.

Celerity’s liquid R&D group partners with OEMs, IC manufacturers, slurry makers, and others in order address diverse liquid applications challenges. Our charter is to turn technological innovation into business results while keeping a pulse on future needs. By engaging Celerity to engineer solutions outside their fabrication plants, our customers have access to an industry-leading dedicated resource while keeping their own tools and manufacturing facilities in full production. To learn more about our liquids R&D and applications laboratory facility, click here.