Celerity ®

Celerity’s selection of tote stations and drums stations provides our customers with the ability to distribute a wide range of slurries from one location to another over a variety of distances and elevations without damaging the slurry or compromising its characteristics. Our customers realize significant savings from the ability to load and store slurries in the subfab away from the blend and distribution point, which typically occupies a more expensive footprint.

Celerity’s bulk blending and distribution systems combine the dual capabilities of blending multiple slurry and chemical constituents along with de-ionized water and then distributing the blended slurry and de-ionized water to multiple points of use on a circulated or distributed loop system.

We offer three primary product lines to satisfy customer needs:

• MFII incorporates a staged blend and distribution system with flow metering and flow control technology to create blends. It is capable of supporting a significant expansion for flow size and throughput.
• MFIII system also uses flow-metering technology to supply chemistry slurry and de-ionized water to a blend tank, which is isolated from the distribution tank and its continuous delivery to the global loop.
• MFVI process employs a novel technique in which two stations simultaneously blend and distribute to a common loop, achieving highly accurate blends and high throughput by means of flow metering control and mass measurement devices.
• SBD100 Series is a new generation precision slurry blending and distribution system for copper, low-k and other CMP applications. It was developed to meet the challenges of 45 nm and beyond technologies, and 300 mm wafer fabrications for high volume applications. SBD 100 series retains all the advantages of MF6 and it is designed in a reduced foot print with high degree of versatility to allow cost effective modular addition of functional options.

Celerity’s point-of-use systems integrate flow controllers that employ a variety of flow measuring and metering techniques. We offer direct flow control point-of-use systems for chemistries based on customer recipes. We also design systems with closed-loop, feed-forward or feed-back techniques to automatically maintain blend quality during the point-of-use distribution. Both types of systems provide excellent control for small flow blend throughput applications.

To help customers understand the changes that occur to slurries during handling, Celerity offers analysis of density, pH, flow, mass, particle distribution and size. We are proficient in a variety of measurement techniques, including but not limited to pH, ultrasonic densitometry, light extinction, ablation, light refraction, light reflectance, fixed bandwidth, spectrophotometry, and measurement of zeta potential. Our products benefit customers with the ability to know when particle sizes increase, so that they can track ranges, adjust to bring systems back into specification, and maintain high yields during CMP.

Celerity’s liquid R&D group partners with OEMs, IC manufacturers, slurry makers, and others in order address diverse liquid applications challenges. Our charter is to turn technological innovation into business results while keeping a pulse on future needs. By engaging Celerity to engineer solutions outside their fabrication plants, our customers have access to an industry-leading dedicated resource while keeping their own tools and manufacturing facilities in full production. To learn more about our liquids R&D and applications laboratory facility, click here.