Celerity :: Flow Measurement + Control

The ability to deliver critical fluids accurately and reliably to semiconductor processes is central to achieving the geometries and processes associated with next-generation applications. Celerity designs and manufactures precisions gas and liquid flow controllers, meters, and pressure controllers.

Celerity stands out in this field with its core competency in fluid delivery systemization. We operate beyond the component level, matching novel and patented technologies with integrated systems to better serve customer needs. We have a tradition of being first to market with differentiating technologies such as MultiFlo and PTI. Our flow products are specified more than any other supplier and are preferred for their field-proven accuracy, repeatability, reliability, flow stability and configurability. In addition, we are committed to leading-edge solutions for gas and liquid delivery roadmaps – supplying faster response times, supporting a broader range of times and temperatures, and enabling tighter controls.

Currently, our core enabling flow control technologies include sensing capabilities that leverage three types of fluid measurement solutions. We supply ultrasonic measurement devices, thermal measurement technology, and pressure-based measurement solutions. Together, they represent a comprehensive set of strategies for blending liquids, gases, and vapors to meet evolving process challenges

Gas Delivery

Celerity is recognized as the industry leader in mass flow controllers. We arrived at this distinction by developing high-volume manufacturing expertise, advancing flow control technologies, and building close relationships with leading OEMs. We were the first to create MFCs with metal seals. We introduced re-rangeable MFCs that could operate with multiple gases.

Standard Flow
High Flow
High Performance
Specialty
Accessories
Metrology
Gas R&D Laboratory

Liquid Delivery

The semiconductor industry’s move to finer geometries and copper interconnects is raising the bar for more precise and cost-effective process control for slurry and chemical dispense in chemical mechanical planarization (CMP) and wet clean applications. To address this need, Celerity leverages the expertise of its Mega brand products, which have been advancing flow control technology for more than a decade.

Low Flow
High Flow
Liquid R&D Laboratory

Vapor Delivery

Advanced integrated circuit manufacturing requires a number of low-pressure dopant and precursor materials, which are becoming more critical in areas such as strained silicon and next-generation thin-film processes. These materials often have low vapor pressures that call for precise thermal control and low pressure drops in their flow controllers and delivery systems.

Vapor Delivery (VDM)

The Celerity CMX series capacitance manometers combines Celerity’s patented contamination resistant sensor technology with advanced digital electronics for improved calibration, real-time compensation and enabling diagnostic and maintenance features.

Benefits: