Celerity :: Vapor Delivery

Advanced integrated circuit manufacturing requires a number of low-pressure dopant and precursor materials, which are becoming more critical in areas such as strained silicon and next-generation thin-film processes. These materials often have low vapor pressures that call for precise thermal control and low pressure drops in their flow controllers and delivery systems.

To meet this need, Celerity manufacturers vapor flow controllers and low-pressure specialty gas flow controllers. We integrate our technology into vapor delivery modules for turnkey delivery of critical process reactants such as de-ionized water vapor. By leveraging Celerity’s unique capabilities to run actual process gasses, our controllers and modules enable superior performance in these critical low-pressure, heavy gas applications.

Vapor Delivery (VDM)

The Celerity VDM series is a compact self-contained module for the delivery of ultra high purity water vapor. It employs proven thermal mass flow delivery and advanced digital electronics for improved accuracy and reliability.
Vapor Delivery

Vapor Delivery (VDM)	Range/Size	Media	Operating Temp	I/O Interface	Data Sheets
TN4900	10sccm to 35slm (N2 equiv.)	Low Pressure Gases & Organometallics	0 to 100°C (32 to 244°F)	Analog
VDM100	300sccm to 6 slpm	DI Water Vapor Creation & Delivery	0 to 100°C (32 to 244°F)	Analog & RS-485

The Celerity VDM100 Vapor Delivery Module is a compact vapor delivery solution, designed for simple OEM tool integration. The VDM100 employs proven thermal mass flow delivery and advanced digital electronics for improved accuracy and reliability.

Benefits: