Celerity :: Pressure Measurement + Display

Celerity’s broad selection of pressure transducers, pressure gauges, and related instruments provides best-in-class monitoring of ultra-high-purity bulk gases, specialty gases, and liquefied process gases. We distinguish ourselves in sensor technology with a digital architecture that provides improved calibration and device-to-device reproducibility.

We also design and manufacture sensors to deliver superior stability, capable of meeting the most exacting requirements. Used by the thousands in fab locations from bulk gas farms to process tools, our devices serve the needs of multiple industries, including flat panel displays, MEMS, solar, and media storage. They also meet a wide range of industry-standard safety requirements, and are capable of withstanding extremes of temperature, humidity, and installation conditions as they improve productivity and solve process challenges for OEM and end-user customers.

Pressure Transducers

Celerity’s pressure transducers use the latest technology advancements in strain gauge technology, including a high-temperature glass bonding process, digital signal processing, high-performance digital electronics, reverse polarity protection, and EMI immunity. The ultra stable, micro-machined silicon strain gauges are matched and glass fused at high temperature to the metal diaphragm. This process reduces “drift” commonly associated with competitive products.
Pressure Transducers

Pressure Transducers	Range	Output	Electrical Connection	Data Sheets
SS2	-15 to 3000	4 to 20mA, 0.05 to 5.05Vdc, 0 to 10Vdc	Bendix, Pigtail, 15 pin D-Sub
SS2 (ATEX Compliant)	30 to 3000	4 to 20mA, 0.05 to 5.05Vdc	Bendix, Pigtail	--
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Pressure Gauges

Celerity’s stainless steel pressure gauges are designed and developed for the demanding high-purity applications of the semiconductor industry. Welded in oxygen-free chambers to meet rigid cleanliness and safety guidelines, the gauges include pressure switches and transmitters, and come in a variety of pressure ranges and process connections.
Pressure Gauges

Pressure Gauges	Range	Accuracy	Compliance
S122/C122/F122 2" Pressure Gauges	Vacuum to 4,000 psi	1% full scale	Class A
IDG202 Digital Pressure Guages	Vacuum to 1,999 psi	±0.5% full scale	CE Compliant
IPS122 2" Indicating Pressure Switches	Vacuum to 4,000 psi	1% full scale	Class A
IPT122 2" Indicating Pressure Transmitters	Vacuum to 4,000 psi	1% full scale	Class A

Pressure Displays + Controllers

Celerity offers a new generation of displays for on-tool gas panel applications and ruggedized displays for off-tool and bulk gas delivery applications. Our high-visibility displays provide local readout of pressure components and other electrical sensors for optimal point-of-application monitoring. Our multi-channel controllers provide programmable alarms and set points for monitoring pressure and liquid levels, while the instant and accurate readout at the component allows customers to troubleshoot and make necessary corrections immediately. Celerity displays can be used for applications that include bulk gas, gas cabinets, gas distribution, wafer polishing, epitaxial layer, oxidation, CVD, ion implant, diffusion, PVD and dry etch.
Pressure Displays and Controllers

Pressure Displays + Controllers	Application	Output	Compliance
LR250 2-Channel Displays and Controllers	Local	Multi-output	CE
SLR Transducer Displays	Transducer Mount	Multi-output	CE, RoHS
TD100 Pressure Transducer Displays	Transducer Mount	4 to 20mA	CE, RoHS

Cylinder Scales

Celerity’s scales stand up to the demands of industry-grade use with an environmentally sealed load-cell that delivers rugged reliability in all environments. Our scales accurate measurement maximizes gas or liquid usage while reducing the risk of wafer scrap or rework caused by an empty cylinder. Manufactured with heavy gauge stainless steel, our scales can withstand the adverse environment and corrosive effects of gas and chemical processes.
Cylinder Scales

Cylinder Scales	Capacity	Output	Compliance	Data Sheets
GCS400 Cylinder Scales	60, 100, 300 lbs	4 to 20mA, 0.05 to 5.05Vdc	US - Class I, II, III, Div 1, 2 Europe - Eex ia IIC T4, SIRA 03ATEX 2587

The Celerity SS2 pressure transducers are a range of high purity pressure transducers designed to meet the needs of on-tool and off-tool applications. The SS2 delivers exceptional long-term stability through advanced sensor design and manufacturing processes.

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