Celerity :: Thermal Measurement + Control

Celerity custom designs, manufactures and supplies temperature sensing instruments and thermal control systems for the semiconductor, MEMS, flat panel, and solar industries. Over the years, we’ve won many application-specific patents, and have attracted multiple major OEMs, which are using our sensors and heaters in their most critical processes.

We work in close partnership with customer engineering groups, and are known for our rapid turnaround of prototypes and short cycle times. In addition to our products’ superior reliability and longer MTBF compared to other providers, we help lower overall the total cost of ownership by not charging for non-recurring engineering or for product development – even though we commonly deliver several prototypes even before securing a purchase order. Our extensive portfolio of integrated intellectual property and custom engineering capabilities positions us as the premier resource for any current and future customer needs in temperature-precise solutions.

Temperature Sensors

To ensure complete integration into customer applications, all of Celerity’s thermal sensors are custom designed in close collaboration with customer engineering – often as early as the semiconductor manufacturing equipment’s initial equipment research and development phase. We also bring to bear Celerity’s significant intellectual property accomplishments in sensor design, leveraging that experience to configure and package the end result into an OEM-specific solution.
Temperature Sensors

Temperature Sensors				Data Sheets
Thermocouples

Heaters

Celerity specializes in gas flow product heaters that are capable of high-precision thermal uniformity to ranges of plus or minus 5 degrees C. As emerging processes such as 45nm and smaller require higher operating temperatures and more precise process gas controls, we are positioned to help, always engaging our highest-level decision-makers to work directly with customers.
Heaters

Heaters				Data Sheets
Custom Heaters

Control Systems

Celerity will soon offer numerous controllers and control systems, which will include a network-enabled, multi-channel, multi-panel closed-loop control system capable of interfacing with any existing network structure. For more information, please contact your nearest Celerity representative.

To learn more about our thermal measurement and control solutions, please contact Loren Richter at +1 650-481-3317 or lrichter@celerity.net.

Celerity custom designs and manufactures an array of highly accurate temperature sensors, including thermocouples and RTDs, in any custom configuration, size, or shape that our client may require. Additionally, we manufacture silcone rubber-backed heaters for heating gas line weldments, valves, filters, ampoules, and other piping components.

Benefits:

Thermocouples

Custom designed for unique customer needs
Built for success in adverse plasma and vacuum environments
Individual calibration reports available
Manufactured in all ANSI types
Recognized market leader with 30+ years designing and manufacturing custom sensors

Gas-Line Heaters