Celerity :: Vacuum Measurement + Control

Today’s thin-film and etch processes all demand precision vacuum measurement and control of the chamber environment to ensure film uniformity and etch rates. Celerity combines rigorous process pressure measurement capabilities with a wide range of flexible pressure control systems to enable improved process control at critical milliTorr pressures.

Our fast-actuating control valves and powerful adaptive control algorithms help ensure reduced time to setpoint and faster stabilization times, thereby decreasing the time for non-productive step changes for improved wafer throughput.

In addition, our advanced digital capacitance manometers deliver sensor technology that is less affected by the build-up of process by-products. The resultant reduction in maintenance and system downtime associated with re-zeroing and replacing gauges for aggressive thin-film and etching processes represents a major lower cost-of-ownership benefit for our customers.

Capacitance Manometers

Celerity’s digital capacitance manometers provide absolute pressure measurements irrespective of gas composition, making them the preferred vacuum gauge for process measurement in both the semiconductor and electronics industries. We offer a comprehensive range of unheated, high-performance gauges, unheated compact gauges, and high-performance heated gauges for the most critical process measurement applications. For example, our heated digital CMX series capacitance manometers can last two to three times as long as conventional analog devices. With their reduced drift, embedded diagnostics, and low maintenance costs, the CMX series is delivering significantly superior performance at a lower cost of ownership.

Capacitance Manometers	Range	Operating Temp.	Output/Signal	Data Sheets
CMX45/CMX100	100 to 1000 Torr	45ºC/100ºC	Analog 0 to 10 VDC, RS-485 & DeviceNet
CMX160	1 to 1000 Torr	160ºC	Analog 0 to 10 VDC, RS-485 & DeviceNet
CMOH/CMLH	1 to 1000 Torr	150ºC/160ºC	Analog 0 to 10 VDC	--
CMC	10 to 1500 Torr	Ambient	Analog 0 to 10 VDC
CDLD	1 to 1000 Torr	Ambient	Analog 0 to 10 VDC

Chamber Pressure Control Systems

Celerity offers a range of traditional butterfly-style process control valves, discrete controllers, and integrated digital pressure controllers (smart butterfly valves). Our pressure control systems feature powerful adaptive algorithms that compensate for varying process conditions in real time without the need for specific PID control algorithms or learning modes. By enabling such flexible control, our solutions benefit customers running multiple process recipes. Moreover, our advanced integrated pressure control systems offer significant improvements in resolutional control, which supports improved film uniformity, and best in class response time enabling wafer throughput improvements.
Chamber Pressure Control Systems

Chamber Pressure Control Systems

Controllers	Control Accuracy	Local Display/Key Pad	Comm. Protocol	Data Sheets
ACX3200/ACX3400	0.25% of Reading (1)	ACX3401	Analog 0 to 10 VDC, RS-232C
ACX1200/ACX2200	0.25% of Reading (1)	ACX2201	Analog 0 to 10 VDC, RS-232C

Throttle Valves	Flange Size	Heated Option	Response Time	Data Sheets
MDVX/MDVHX	KF40 to ISO100	Integrated Option KF50 & ISO100B	2 seconds (Open/Close)

Integrated Pressure Controllers	Control Accuracy	Flange/Fitting Size	Response Time	Data Sheets
Intellisys Smart Butterfly Valve	0.25% of Reading (2)	KF25 to ISO200	125 milli-seconds (Open/Close)
UPC 8130	1% full scale	4 VCR	User Selectable: 0.5 to 8 seconds

1. 0.25% of setpoint plus ±0.01% of full scale range of capacitance manometer.
2. 0.25% of setpoint or 5mV, which ever is greater.

The Celerity CMX series capacitance manometers combines Celerity’s patented contamination resistant sensor technology with advanced digital electronics for improved calibration, real-time compensation and enabling diagnostic and maintenance features.

Benefits: