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The Celerity VDM100 Vapor Delivery Module is a compact vapor delivery solution, designed for simple OEM tool integration. The VDM100 employs proven thermal mass flow delivery and advanced digital electronics for improved accuracy and reliability.
Benefits:
  • Improved accuracy
  • High purity design
  • Compact design
  • Improved reliability through design
  VDM100 Demo

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SEMICON Europa 2008
Date: October 7 - 9, 2008
Venue: New Landesmesse Stuttgart
Location: Stuttgart, Germany
Booth: Hall 1, #560
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