The latest technology roadmaps associated with devices to 45nm demand innovation in every facet of the semiconductor manufacturing process. At Celerity, innovation drives all we do, especially as we apply our legacy expertise in engineering, manufacturing, and productivity to create turnkey fluid delivery and management systems.

Relying on our global resources and investments in precision gas and liquid delivery solutions allows OEMs to sharpen their internal focus, freeing them to pursue and refine their own core competencies. The result gives customers superior methods for monitoring, measuring, and delivering gas and liquid molecules at critical points in the process chamber, which helps pave the way to next-generation geometries.

Integrated System Solutions

A long history of working with high-purity processes and technologies gives Celerity the experience and insight into how to best implement customers’ goals. As a recognized global leader in the design, engineering, and manufacturing of gas and liquid delivery solutions for the semiconductor and other related industries, we apply our core expertise to pioneer diverse custom-integrated system solutions.

Markets Served

Celerity manufactures precision instruments, thermal sensing and control systems, and gas and liquid delivery modules featuring embedded technologies, all of which serve the demanding needs of thin-film manufacturing processes.

R&D Laboratories

Celerity maintains dedicated best-in-class gas and liquid research and development laboratories as part of its commitment to meeting customer needs – now and in the future. Our labs include precision scientific equipment to re-create and test actual process chemistries in real-time during front-end product development to ensure more robust solutions for gas and liquid delivery.

Technologies

Technology drives development toward the next generation of semiconductor and electronics devices. And Celerity’s long history of leading fluid technology delivery expertise – depicted here in a timeline – has helped advance the emergence of tighter geometries and more demanding processes through continuous innovation.

  • Integrated System Solutions
  • Markets Served
  • R&D Laboratories
  • Technologies
SS2

The Celerity SS2 pressure transducers are a range of high purity pressure transducers designed to meet the needs of on-tool and off-tool applications. The SS2 delivers exceptional long-term stability through advanced sensor design and manufacturing processes.

Benefits:
  • Superior stability – less maintenance
  • Excellent thermal stability – improved measurement reproducibility
  • Digital accuracy – improved process control
  • Improved availability and OTD
  • Reduced cost of ownership
PDF  View Product DatasheetMore
  SS2 Demo


North America Support

+1 888 275 8946

International Support

+(INTL access code) 800 3333 3100

Download INTL access code list here.

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SEMICON West 2008
Date: July 15 - 17, 2008
Venue: W Hotel
Location: San Francisco, CA
Booth: Work Room 3
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Blend + Dispense Systems
Flow Measurement + Control
Pressure Measurement + Display
Thermal Measurement + Control
Vacuum Measurement + Control

The glossary section provides brief descriptions of technical terms used throughout this website.

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