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Unit 125

The Celerity Unit 125 integrated flow controller achieves unprecedented setpoint response time, enhanced accuracy, and industry-proven flow stabilization by combining thermal and pressure sensor technologies with primary gas calibration metrology. The result is faster recipe stabilization time, improved set point accuracy and configurable gas and flow capabilities. These capabilities are enabling for etch processes, MEMS / nanotechnology, low vapor pressure and reactive chemistries.

Benefits:
  • Fast recipe stabilization time
  • Elimination of pressure transient effects
  • Improved setpoint accuracy
  • Reduced MFC part stocking requirements
  • Reduced gas abatement costs
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  Unit 125 Demo