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LF100
The Celerity LF100 employs proprietary technology to meet the needs of the most demanding wet chemical processes. This technology utilizes non-intrusive ultrasonic sensors to ensure that liquids are delivered without impacting sensitive process materials and eliminating particulate contribution from the component. Closed-loop control provides fast recovery time for setpoint changes and fluctuation in facility pressure.
Benefits:
  • Provides solution for problematic peristaltic pumps
  • Optimizes chemical consumption, improving process reproducibility
  • Repeatable controlled dispense rates minimizes waste
  • Reduces wafer defects attributed to current dispensing methods
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  LF100 Demo