For additional product notes and technology updates, application notes can be downloaded here.

PDFBasics of Thermal Mass Flow Control

PDFBenefits of Auto Shut-off on Mass Flow Controllers

PDFContamination of Reactive Gases in Semiconductor Manufacturing Equipment

PDFElectrical Connections for Unit Mass Flow Controllers

PDFExtended Range Capability: IN2 Series Mass Flow Controllers

PDFFirmware Revision History for DeviceNet MFCs

PDFFirmware Revision History for MFCs Utilizing 203PCB

PDFFirmware Revision History for MFCs Utilizing 204, 207, and 212 PCCBS’s

PDFHow the IsoSensor Eliminates Thermal Siphoning

PDFIFC125 Pressure Transducer and Flow meter Zeroing procedure

PDFInstallation Instructions for Celerity’s unit Model 7320 Mass Flow Controller

PDFI/O Assembly Quick Reference

PDFMFC Zeroing Procedure

PDFMounting Considerations When Upgrading 1100 or 1160 Series MFCs

PDFMultiFlo Conversion Factor Unit Testing

PDFRecommended Mass Flow Controller Purging Procedure

PDFRecommended Operating Pressures for all Gases

PDFSecondary Damage to Materials From Process Gas byproducts

PDFTorque and Pattern Procedure for Connecting MFCs

PDFUser-Configurability: IN2 Series Mass Flow Controllers

PDFZeroing Procedure: IN Series Mass Flow Controllers

The Celerity GFV100 gas flow verifier is a compact Rate of Rise flow measurement standard designed to validate MFC accuracy on-tool with actual process gases. The GFV100 enables accurate, faster flow checks compared to traditional process chamber based leak-up tests.
Benefits:
  • Greater accuracy at lower gas flows
  • Technology path to in-situ re-calibration of MFC’s
  • Flow Range: 1 sccm to 2000 sccm
  • Simple tool integration
  GFV100 Demo