For a complete set of product specifications, datasheets for our available products can be downloaded here.

Chemical Blending + Distribution


Chemical Bulk Distribution Systems

Chemical Bulk Distribution SystemsData Sheets
Mega MP100PDF 
Mega MP100SSPDF 
Mega MP25 PDF 
Mega MP4200SFPDF 
Mega MP50PDF 
Mega MP500SFPDF 

Chemical Bulk Blending + Distribution Systems

Chemical Bulk Blending + Distribution SystemsData Sheets
Mega MB1100DTPDF 
Mega MB1100PVPDF 
Mega MB1100SFPDF 
Mega MB2500SFPDF 

Slurry Blending + Distribution


Slurry Blending + Distribution Systems

Slurry Blending + Distribution SystemsData Sheets
Mega MFIIIBPDF 
Mega MFIIICPDF 
Mega MFVI – 300 SeriesPDF 

Gas Delivery


Standard Flow

ModelRange/SizeSealI/O InterfaceData Sheets
IN23sccm to 30slmMetalD/A or DnetPDF 
IN3XP3sccm to 30slmMetalD/A or DnetPDF 
TN260/TN36010sccm to 30slmElastomerAnalogPDF 
TN280/TN38010sccm to 30slmElastomerAnalogPDF 
TN2900/TN390010sccm to 30slmMetal or ElastomerAnalogPDF 
TN2979/TN397910sccm to 20slmMetalAnalogPDF 
Unit 1225sccm to 30slmElastomerAnalogPDF 
Unit 16603sccm to 30slmMetalAnalogPDF 
Unit 1661/1661e3sccm to 30slmMetalD/APDF 
Unit 1805sccm to 30slmElastomerAnalogPDF 
Unit 73003sccm to 30slmElastomerAnalog -
Unit 7301/73043sccm to 30slmElastomerD/A or Dnet -
Unit 73603sccm to 30slmMetalAnalogPDF 
Unit 7361/73643sccm to 30slmMetalD/A or DnetPDF 
Unit 81003sccm to 30slmElastomerAnalogPDF 
Unit 8101/81053sccm to 30slmElastomerD/A or DnetPDF 
Unit 813010sccm to 30slmElastomerAnalogPDF 

High Flow

ModelRange/SizeSealI/O InterfaceData Sheets
IN3XP-HF30slm to 150slmMetalD/A or Dnet -
TN262/TN36230slm to 200slmElastomerAnalogPDF 
TN2920/TN392030slm to 200slmElastomerAnalogPDF 
TN2925/TN3925200slm to 1000slmElastomerAnalogPDF 

High Performance

ModelRange/SizeSealI/O InterfaceData Sheets
Unit 1253sccm to 30slmMetalD/A or DnetPDF 
Unit 1325sccm to 30slmMetalAnalogPDF 
Unit 81603sccm to 30slmMetalAnalogPDF 
Unit 8161/81653sccm to 30slmMetalD/A or DnetPDF 
Unit 82603sccm to 30slmMetalAnalogPDF 
Unit 82613sccm to 30slmMetalD/APDF 
Unit 8561/85653sccm to 30slmMetalD/A or DnetPDF 

Specialty

ModelRange/SizeSealI/O InterfaceData Sheets
RFC100500sccm to 2000sccmMetalAnalog or DNetPDF 
TN490010sccm to 35slmMetal or ElastomerAnalogPDF 
Unit 16622sccm to 200sccmMetalAnalog -
Unit 1663/16642sccm to 200sccmMetalD/A or Dnet -
Unit 81622sccm to 200sccmMetalAnalog -
Unit 8163/81642sccm to 200sccmMetalD/A or Dnet -
Unit 8563/85642sccm to 200sccmMetalD/A or Dnet -

Liquid Delivery


Low Flow

Low FlowFlow RangeAccuracyControl ValveData Sheets
LF100Up to 500ml/min<±1% of flow, 10~100% SP ±.75ml/min (<10% of flow)Needle ValvePDF 
LF105Up to 500ml/min<±1% of flow, 10~100% SP ±.75ml/min (<10% of flow)Pinch Valve -

High Flow

High FlowFlow RangeAccuracyControl ValveData Sheets
LF150100 to 2500ml/min<±1% of flow, 10~100% SP ±2.5ml/min (<10% of flow)Needle Valve -

Vapor Delivery


Vapor Delivery (VDM)

Vapor Delivery (VDM)Range/SizeMediaOperating TempI/O InterfaceData Sheets
TN490010sccm to 35slm (N2 equiv.)Low Pressure Gases & Organometallics0 to 100°C (32 to 244°F)AnalogPDF 
VDM100300sccm to 6 slpmDI Water Vapor Creation & Delivery0 to 100°C (32 to 244°F)Analog & RS-485PDF 

Pressure Transducers

Pressure TransducersRangeOutputElectrical ConnectionData Sheets
SS2-15 to 30004 to 20mA, 0.05 to 5.05Vdc, 0 to 10VdcBendix, Pigtail, 15 pin D-SubPDF 
SS2 (ATEX Compliant)30 to 30004 to 20mA, 0.05 to 5.05VdcBendix, Pigtail -
-

Pressure Gauges

Pressure GaugesRangeAccuracyComplianceData Sheets
S122/C122/F122 2" Pressure GaugesVacuum to 4,000 psi1% full scaleClass APDF 
IDG202 Digital Pressure GuagesVacuum to 1,999 psi±0.5% full scaleCE CompliantPDF 
IPS122 2" Indicating Pressure SwitchesVacuum to 4,000 psi1% full scaleClass APDF 
IPT122 2" Indicating Pressure TransmittersVacuum to 4,000 psi1% full scaleClass APDF 

Pressure Displays + Controllers

Pressure Displays + ControllersApplicationOutputComplianceData Sheets
LR250 2-Channel Displays and ControllersLocalMulti-outputCEPDF 
SLR Transducer DisplaysTransducer MountMulti-outputCE, RoHSPDF 
TD100 Pressure Transducer DisplaysTransducer Mount4 to 20mACE, RoHSPDF 

Cylinder Scales

Cylinder ScalesCapacityOutputComplianceData Sheets
GCS400 Cylinder Scales60, 100, 300 lbs4 to 20mA, 0.05 to 5.05VdcUS - Class I, II, III, Div 1, 2 Europe - Eex ia IIC T4, SIRA 03ATEX 2587PDF 

Temperature Sensors

Temperature SensorsData Sheets
ThermocouplesPDF 

Heaters

HeatersData Sheets
Custom HeatersPDF 

Capacitance Manometers

Capacitance ManometersRangeOperating Temp.Output/SignalData Sheets
CMX45/CMX100100 to 1000 Torr45ºC/100ºCAnalog 0 to 10 VDC, RS-485 & DeviceNetPDF 
CMX1601 to 1000 Torr160ºCAnalog 0 to 10 VDC, RS-485 & DeviceNetPDF 
CMOH/CMLH1 to 1000 Torr150ºC/160ºCAnalog 0 to 10 VDC -
CMC10 to 1500 TorrAmbientAnalog 0 to 10 VDCPDF 
CDLD1 to 1000 TorrAmbientAnalog 0 to 10 VDCPDF 

Chamber Pressure Control Systems

Chamber Pressure Control Systems

ControllersControl AccuracyLocal Display/Key PadComm. ProtocolData Sheets
ACX3200/ACX34000.25% of Reading (1)ACX3401Analog 0 to 10 VDC, RS-232CPDF 
ACX1200/ACX22000.25% of Reading (1)ACX2201Analog 0 to 10 VDC, RS-232CPDF 
Throttle ValvesFlange SizeHeated OptionResponse TimeData Sheets
MDVX/MDVHXKF40 to ISO100Integrated Option KF50 & ISO100B2 seconds (Open/Close)PDF 
Integrated Pressure ControllersControl AccuracyFlange/Fitting SizeResponse TimeData Sheets
Intellisys Smart Butterfly Valve0.25% of Reading (2)KF25 to ISO200125 milli-seconds (Open/Close)PDF 
UPC 81301% full scale4 VCRUser Selectable: 0.5 to 8 secondsPDF 

Celerity custom designs and manufactures an array of highly accurate temperature sensors, including thermocouples and RTDs, in any custom configuration, size, or shape that our client may require. Additionally, we manufacture silcone rubber-backed heaters for heating gas line weldments, valves, filters, ampoules, and other piping components.
Benefits:

Thermocouples

  • Custom designed for unique customer needs
  • Built for success in adverse plasma and vacuum environments
  • Individual calibration reports available
  • Manufactured in all ANSI types
  • Recognized market leader with 30+ years designing and manufacturing custom sensors

Gas-Line Heaters

  • High uniformity
  • Predictable thermal performance
  • Custom-built configurations
  • Precise engineering
  • Lowered lifetime cost of ownership and reduced maintenance costs
  Thermal Measurement + Control Demo