Celerity :: Customer Care

For questions concerning product specifications, order management (i.e. quotes, sales order administration), and service and repair requests (i.e. product returns, failure analysis, repair and calibration), contact your local customer care representative.

Flow, Pressure, and Vacuum Measurement + Control Products

Region	Location	Telephone	Email
North America	915 Enterprise Blvd. Allen, TX 75013-8003	+1 888 275 8946 US +(INTL access code) 800 3333 3100 INTL Download INTL access code list here.	CustomerCare @celerity.net
Europe	Zur Wetterwarte 50, Gebäude 337B 01109 Dresden, Germany	+49 351 2152 0400	EuropeCustomerService @celerity.net
Asia	No. 150, Cailun Rd. Zhangjiang Industrial Park Pudong New Aera Shanghai, China 201210	+86 22 5079 8828	-
	Heda Industrial Zone Xing-Hua Street Xi-Qing Economic Development Tianjin, China 30038	+86 22 8396 6095	-
	2F Nara Bldg. 2 2-2-8 Shin Yokohama, Kohoku-ku Yokohama-shi, Kanagawa 222-0033 Japan	+81 45 477 3521	-
	D-406 Bundang Techno Park 151 Sungnam, Kyungki-do, 463-070 Korea	+82 31 708 2522	-
	BLK 164 Kallang Way, #01-01/02/03 JTC Bldg. Singapore 349248	+65 6744 7041	-
	No.11, Lane 596, Sec.2, Jiansing Rd. Sin Fong Township, Hsin-Chu County Taiwan 30471	+886 911 035 023	-

Thermal Measurement + Control Products

Location	Telephone	Email
620 Price Ave. Redwood City, CA 94063	+1 650 481 3317	lrichter@celerity.net

Chemical and Slurry Blending and Distribution (Mega Systems)

Location	Telephone	Email
9660 SW Herman Rd. Tualatin, OR 97062	+1 503 783 2115	Portland.CustomerService @celerity.net

Gas Delivery Modules

Location	Telephone	Email
200-C Parker Dr., Ste. 600 Austin, TX 78728	+1 512 246 9092	isales@celerity.net
9660 SW Herman Rd. Tualatin, OR 97062	+1 503 783 2115	-

Celerity Service/Repair Center Support
Fully equipped to handle repairs, calibration and reconfiguration services, Celerity Service Centers offer a complete diagnostic review and repair of all Celerity instrumentation products.

Product Return Authorization - Instruments
To ensure timely processing of your service order request, a Return Materials Authorization (RMA) must be obtained from Customer Care. An RMA Request Form and Contamination Disclosure Form must be completed prior to returning the devices to one of our Service Centers.

Note: The RMA number and Contamination Disclosure Form must be visible on the exterior of the shipping carton. In addition, a copy of the RMA Request Form should be enclosed.

SRV-001-0011_Rev_001_Contamination_Disclosure.pdf

Celerity_RMA_Request_Form.doc

Warranty
Please click on the link below to download complete Warranty information.

Warranty.pdf

The Celerity Unit 125 integrated flow controller achieves unprecedented setpoint response time, enhanced accuracy, and industry-proven flow stabilization by combining thermal and pressure sensor technologies with primary gas calibration metrology. The result is faster recipe stabilization time, improved set point accuracy and configurable gas and flow capabilities. These capabilities are enabling for etch processes, MEMS / nanotechnology, low vapor pressure and reactive chemistries.

Benefits: