Technical Support

For your technical questions, Celerity's skilled and experienced product support engineers are available 24/7 by toll-free telephone +1 888-275-8946 or by filling out and submitting a Help Request Form.

Field Support

Celerity’s expertly trained field applications engineers provide a full complement of services for customers on-site. Frequent areas of support include process or hardware guidance, product and software training, assisting the trouble shooting or repair of any technical issues, and auditing your Celerity products for our latest support program enhancements. For more information, please contact your local Field Service Representative.

Flow, Pressure, and Vacuum Measurement + Control Products

Region Contact Telephone Email
Northwest US Gary Gress +1 503 783 2046 ggress@celerity.net
Western US Victor Parra +1 408 935 4574 vparra@celerity.net
Central US Jasper Gilmar +1 512 246 5896 jgilmar@celerity.net
Eastern US Joe Fabiano +1 845 246 0557 jfabiano@celerity.net

Thermal Measurement + Control Products

Region Contact Telephone Email
Redwood City, CA David Yohn +1 650 481 3319 dyohn@celerity.net

Chemical and Slurry Blending and Distribution (Mega Systems)

Region Contact Telephone Email
Northwest US Brian Julich +1 503 783 2165 bjulich@celerity.net

International Technical Support

Region Contact Telephone Email
Korea YD Lee +82 17 717 8980
South East Asia Edward Chan +88 691 1035 2023
Japan Hiroshi Tanabe +81 80 5198 3832
Europe PJ Ryan +35 38 7799 3355

International Service Managers

Region Contact Telephone Email
Korea YD Lee +82 17 717 8980
South East Asia Gary Huang +88 69 2820 4240
Japan Hiroshi Tanabe +81 80 5198 3832
North America Ron Monceaux +1 512 656 9768
Europe Iven Wiesner +49 1520 8512633
LF100
The Celerity LF100 employs proprietary technology to meet the needs of the most demanding wet chemical processes. This technology utilizes non-intrusive ultrasonic sensors to ensure that liquids are delivered without impacting sensitive process materials and eliminating particulate contribution from the component. Closed-loop control provides fast recovery time for setpoint changes and fluctuation in facility pressure.
Benefits:
  • Provides solution for problematic peristaltic pumps
  • Optimizes chemical consumption, improving process reproducibility
  • Repeatable controlled dispense rates minimizes waste
  • Reduces wafer defects attributed to current dispensing methods